Actively Servoed Multi-Axis Microforce Sensors
نویسندگان
چکیده
sors capable of resolving forces up to 490pN with a resolution of O.OlpN in z, and up to 900pN with a resolution of 0.24~N in I, in the oassive mode, Electrostatic microactuators are microsc~py (AFM) techniques, mere are four limitations restricting AFM use in cellular force measurement during .~~ inkgrated to the force t, operate in manipulation. First, different types of end-effectors such as servoed mode, in which system stiffness is modulated using microneedles are difficult, if possible, to be integrated in force compensation, greatly increasing force measurement dythe AFM system. Second, a major requirement in AFM
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